Reduction of the dislocation density in HVPE-grown GaN epi-layers by an in situ SiNx treatment

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Access status: Embargo until 2233-03-22 , Primary 84130.pdf (479.53 KB)

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Ashraf, H.
Sridhara Rao, D.V.
Gogova, D.
Siche, D.
Fornari, R.
Humphreys, C.J.
Hageman, P.R. Paul

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