Arsenic Formation on GaAs during Etching in HF Solutions: Relevance for the Epitaxial Lift-Off Process

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Smeenk, N.J.

Engel, J. Jasper

Mulder, P. Peter

Bauhuis, G.J. Gerard

Bissels, G.

Schermer, J.J. John

Vlieg, E. Elias

Kelly, J.J.